Gencer, A. H. ; Chakravarthi, S. ; Clejan, I. ; Dunham, S. T.
Pub. info.:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.359-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.398-406, 1996. Pennington, NJ. Electrochemical Society
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.21-31, 1995. Pennington, NJ. Electrochemical Society