Silicon-on-insulator technology and devices XII : proceedings of the international symposium. pp.377-382, 2005. Pennington, N.J.. Electrochemical Society
Deguet, C. ; Dechamp, J. ; Morales, C. ; Charvet, A.M. ; Clavelier, L. ; Loup V. ; Hartmann, J.M. ; Kernevez, N. ; Campidelli, Y. ; Allibert, F. ; Richtarche, C. ; Akatsu, T. ; Letertre, F.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.78-88, 2005. Pennington, NJ. Electrochemical Society