1.

Conference Proceedings
Conference Proceedings
1. Aid HfSiO High-k Dielectric and CVD-TaN Metal Gate
Chung, U. I. ; Park, S. G. ; Cho, H. -J. ; Lee, H. L. ; Park, H. B. ; Jeon, T. S. ; Jin, B. J. ; Kang, S. B. ; Shin, Y. G. ; Moon, J. T.
Pub. info.: Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium.  pp.362-368,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-04
2.

Conference Proceedings
Conference Proceedings
2. A Study of the Planarity by STI CMP Erosion Modeling
Chung, U. I. ; Hah, S. R. ; Han, J. H. ; Hong, C. K. ; Kang, G. W. ; Kim, K. H.
Pub. info.: Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.33-44,  2000.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 566