1.

Conference Proceedings

Conference Proceedings
Chung, D.-H. ; Park, J.-Y. ; Lee, M.-K. ; Shin, I.-K. ; Choi, S.-W. ; Yoon, H.-S. ; Sohn, J.-M. ; Chen, J.F. ; Van Den Broeke, D.J.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1492-1499,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
2.

Conference Proceedings

Conference Proceedings
Kim, S.-H. ; Chung, D.-H. ; Park, J.S.. ; Shin, I.K. ; Choi, S.W. ; Sohn, J.-M. ; Lee, J.-H. ; Shin, H.-S. ; Chen, J.F. ; Van Den Broeke, D.J.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.568-578,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
3.

Conference Proceedings

Conference Proceedings
Park, J.-H. ; Chung, D.-H. ; Lee, M.-K. ; Shin, I.-K. ; Choi, S.-W. ; Yoon, H.-S. ; Sohn, J.-M. ; Chen, J.F. ; Van Den Broeke, D.J.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.727-736,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
4.

Conference Proceedings

Conference Proceedings
Lee, J.-H. ; Chung, D.-H. ; Kim, H.-C. ; Nam, D.-S. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S.
Pub. info.: Optical Microlithography XVI.  Part One  pp.251-260,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
5.

Conference Proceedings

Conference Proceedings
Lee, J.-H. ; Chung, D.-H. ; Cha, D.-C. ; Kim, H.-S. ; Park, J.-S. ; Nam, D.-G. ; Woo, S.-K. ; Cho, H.-S. ; Han, W.-S.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.1253-1262,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
6.

Conference Proceedings

Conference Proceedings
Lee, J.-H. ; Kim, H.-D. ; Chung, D.-H. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.727-735,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
7.

Conference Proceedings

Conference Proceedings
Huh, S. ; Park, J.H. ; Chung, D.-H. ; Kim, C.-H. ; Shin, I.-K. ; Choi, S.-W. ; Sohn, J.-M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.787-795,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130