1.

Conference Proceedings
Conference Proceedings
1. METHOD FOR EVALUATION AND OPTIMIZATION OF PARTICLE REMOVAL PROCESSES
Narayanswami, N. ; Ruether, P.A. ; Thomes, G. ; Weygand, J.F. ; Lee, N.-P. ; Christenson, K.K. ; Butterbaugh, J.W. ; Hoo, S.H. ; Liu, B.Y.H.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.469-476,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
2.

Conference Proceedings
Conference Proceedings
2. THE USE OF CENTRIFUGAL FORGE TO IMPROVE RINSING EFFICIENCY
Christenson, K.K.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.153-162,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
3.

Conference Proceedings
Conference Proceedings
3. EFFECTS OF SEQUENTIAL CHEMISTRIES ON PARTICLE REMOVAL
Christenson, K.K. ; Smith, S.M. ; Nelson, S. ; Carison, B. ; Bode, C. ; Johnson, K.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.567-574,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20
4.

Conference Proceedings
Conference Proceedings
4. EFFECTS OF SC-1 DILUTION AND TEMPERATURE ON VARIOUS PARTICLE REMOVAL CHALLENGES
Christenson, K.K. ; Smith, S.M. ; Bode, C. ; Johnson, K.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.597-604,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20