1.

Conference Proceedings
Conference Proceedings
1. CD variation sources of photomask
Kim,B.G. ; Choi,S.W. ; Yu,Y.H. ; Yoon,H.S. ; Sohn,J.M.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.42-52,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
2.

Technical Paper
Technical Paper
2. Parametric Study of a Rapidly Deploying Spoiler with Two-Equation Turbulence Models
Choi,S.W. ; Chang,K.S. ; Ok,H.
Pub. info.: AIAA paper.  pp.1-10,  2001.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2001
3.

Conference Proceedings
Conference Proceedings
3. Parameters affecting megasonic power transmittance in the megasonic cleaning process
Kim,Y.H. ; Park,J.H. ; Lee,K.H. ; Choi,S.W. ; Yoon,H.S. ; Sohn,J.M.
Pub. info.: Photomask and X-Ray Mask Technology V.  pp.455-462,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3412
4.

Conference Proceedings
Conference Proceedings
4. Mask technology for 0.18-ｦﾌm device generation
Sohn,J.M. ; Choi,S.W. ; Kim,B.G. ; Cho,H.K. ; Yoon,H.S.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.2-11,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793
5.

Conference Proceedings
Conference Proceedings
5. Resolution enhancement with thin Cr for chrome mask making
Cha,B.C. ; Choi,S.W. ; Kim,J.M. ; Cho,H.J. ; Sohn,J.M.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.53-61,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793