1.

Conference Proceedings
Conference Proceedings
1. Optical proximity correction considering mask manufacturability and its application to 0.25-ｦﾌm DRAM for enhanced device performance
Park,C.-H. ; Rhie,S.-U. ; Choi,J.-H. ; Park,J.-S. ; Seo,H.-W. ; Kim,Y.-H. ; Park,Y.-K. ; Han,W.-S. ; Lee,W.-S. ; Kong,J.-T.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1041-1046,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. Characteristic study of electron beam stabilization for deep-UV photoresists
Kim,M.-S. ; Choi,J.-H. ; Rho,C.-H. ; Hong,M.-J. ; Jun,B.-J. ; Gil,M.-G. ; Kim,B.-H. ; Ahn,D.-J. ; Ross,M.F. ; Wong,S.S.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part2  pp.782-792,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999
3.

Conference Proceedings
Conference Proceedings
3. Surface treatment effects on the surface recombination velocity of ZnS/HgCdTe interface
Choi,J.-H. ; Lee,H.C. ; Choi,M.S.
Pub. info.: Infrared Detectors and Focal Plane Arrays VI : 25-27 April 2000, Orlando, USA.  pp.390-396,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4028
4.

Conference Proceedings
Conference Proceedings
4. Development of biocompatible micropatterns for single-cell biosensors
Chang,J.K. ; Park,C.Y. ; Choi,J.-H. ; Kim,Y.-K. ; Han,D.C.
Pub. info.: Proceedings of micro- and nanofbricated electro-optical mechanical systems for biomedical and environmental applications : 10-11 February 1997, San Jose, California.  pp.31-40,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2978
5.

Conference Proceedings
Conference Proceedings
5. Low-cost integrated-optic fiber couplers
Sheem,S.K. ; Zhang,F. ; Choi,J.-H. ; Lee,Y.-W. ; Low,S. ; Lu,S.-Y.
Pub. info.: Optoelectronic Interconnects and Packaging IV.  pp.11-15,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3005
6.

Conference Proceedings
Conference Proceedings
6. Mask considerations for manufacturing assist features
Choi,J.-H. ; Cho,W.-I. ; Kim,B.-S. ; Yang,S.-H. ; Moon,S.-Y. ; Choi,S.-W. ; Han,W.-S. ; Sohn,J.-M.
Pub. info.: Optical Microlithography XIV.  4346  pp.131-140,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
7.

Conference Proceedings
Conference Proceedings
7. Optimum field-size strategy for DRAM mass production in low-k1 process
Park,C.-H. ; Yim,D. ; Lee,S.-H. ; Yang,H.-J. ; Choi,J.-H. ; Shin,Y.-C. ; Kim,C.-D. ; Choi,J.-S. ; Kang,K.-O. ; Kim,S.-W. ; Lee,D.-D. ; Yoon,G.-H.
Pub. info.: Optical Microlithography XIV.  4346  pp.1011-1019,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
8.

Conference Proceedings
Conference Proceedings
8. Resolution improvement of chemical-amplification resist using process-induced effect correction
Choi,J.-H. ; Kim,C.-Y. ; Lee,J.-Y. ; Moon,S.-W. ; Choi,S.-W. ; Han,W.-S. ; Sohn,J.-M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.298-305,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409