1.

Conference Proceedings
Conference Proceedings
1. Passivation and Etching Behaviors of Copper Surface in Copper CMP Slurries
Eom, D.-H. ; Hong, Y.-K. ; Lee, S.-H. ; Park, J.-Y. ; Myung, J.-J. ; Park, J.-G. ; Kim, K.-S. ; Song, H.-S. ; Park, H.-S. ; Choi, Y.-S.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.226-236,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-1
2.

Conference Proceedings
Conference Proceedings
2. Use of rotating compensator spectroscoic ellipsometry for monitoring the photoresist etching on Si wafer
Choi, Y.-S. ; Kim, Y.-H. ; Kim, G.-H. ; Oh, H.-K. ; An, I.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.841-848,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
3.

Conference Proceedings
Conference Proceedings
3. Automatic control of parallel stereoscopic camera by disparity compensation
Kwon, K.-C. ; Choi, Y.-S. ; Kim, N. ; Gil, S.-K.
Pub. info.: Stereoscopic Displays and Virtual Reality Systems X.  pp.417-423,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5006