1.

Conference Proceedings
Conference Proceedings
1. The Hot Carrier Degradation and Device Characteristics With Variation of Pre-Metal Dielectric Materials
Seo, Y. J. ; Choi, W. S. ; Kim, S. Y. ; Kim, C. I. ; Chang, E. G. ; Lee, W. S.
Pub. info.: Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A..  pp.179-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 544
2.

Conference Proceedings
Conference Proceedings
2. Real time analysis of the haze environment trapped betsween the pellicle film and the mask surface [6283-07]
Choi, J. ; Lee, S. ; Cho, Y. ; Ji, S. ; Cha, C. ; Choi, W. S. ; Han, S. W.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XIII.  pp.62830A-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6283
3.

Conference Proceedings
Conference Proceedings
3. Novel mask inspection flow for better defect review and analysis [6283-107]
Lim, K. ; Park, H. J. ; Chung, H. D. ; Choi, W. S. ; Han, S. W. ; Takizawa, H. ; Miyazaki, K.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XIII.  pp.62830Z-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6283