1.

Conference Proceedings

Conference Proceedings
Park, B.W. ; Choi, J.I. ; Hur, C.W. ; Oh, T.K. ; Kang, I.K.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.609-614,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
2.

Conference Proceedings

Conference Proceedings
Lee, T.Y. ; Whan, N.-K. ; Lee, B.H. ; Chin, S.-B. ; Cho, D.H. ; Choi, J.I. ; Hur, S.S. ; Ko, K.H. ; Yeo, J.-H.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.859-864,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375