Kim, Y.-S. ; Hyun, Y.-S. ; Kong, K.-K. ; Kim, H. ; Choi, B.-H.
Pub. info.:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1388-1394, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering