1.

Conference Proceedings

Conference Proceedings
Lim,S.-C. ; Kim,B.-G. ; Choi,S.-W. ; Lee,K.-H. ; Cho,H.-J. ; Yu,Y.-H. ; Cho,H.-K. ; Sohn,J.-M.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.301-311,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236
2.

Conference Proceedings

Conference Proceedings
Kim,I.-S. ; Lee,J.-H. ; Cha,D.-H. ; Park,J.-S. ; Cho,H.-K. ; Moon,J.-T.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.872-881,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
3.

Conference Proceedings

Conference Proceedings
Cha,D.-H. ; Kye,J.-W. ; Seong,N.-G. ; Kang,H.-Y. ; Cho,H.-K. ; Moon,J.-T.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.46-54,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
4.

Conference Proceedings

Conference Proceedings
Seong,N. ; Kim,H. ; Cho,H.-K. ; Moon,I.-T. ; Lee,S.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.1170-1174,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
5.

Conference Proceedings

Conference Proceedings
Kim,I.-S. ; Kim,B.-S. ; Lee,J.-H. ; Cho,H.-K. ; Moon,J.-T.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.17-24,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181
6.

Conference Proceedings

Conference Proceedings
Park,J.H. ; Cho,H.-K. ; Kim,Y.-H. ; Lee,K.-H. ; Yoon,H.-S.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.300-311,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793
7.

Conference Proceedings

Conference Proceedings
Seo,E.-J. ; Sohn,Y.-S. ; Bak,H.-J. ; Oh,H.-K. ; Woo,S.-G. ; Seong,N. ; Cho,H.-K.
Pub. info.: Advances in resist technology and processing XVIII.  4345  pp.963-972,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345
8.

Conference Proceedings

Conference Proceedings
Kang,H.-J. ; Kim,B.-S. ; Park,J.-S. ; Kim,I.-S. ; Yeo,G.-S. ; Lee,J.-H. ; Cho,H.-K. ; Moon,J.-T.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.1096-1103,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562