1.

Conference Proceedings

Conference Proceedings
Seong,N. ; Yeo,G. ; Cho,H. ; Moon,J.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.30-39,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings

Conference Proceedings
Hong,J. ; Lee,J. ; Cho,H. ; Moon,J. ; Lee,S.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.856-862,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
3.

Conference Proceedings

Conference Proceedings
Nam,D. ; Seong,N. ; Cho,H. ; Moon,J. ; Lee,S.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.283-292,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
4.

Conference Proceedings

Conference Proceedings
Kim,B. ; Park,C. ; Ryoo,M. ; Lee,K. ; Cho,H. ; Moon,J.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.943-952,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
5.

Conference Proceedings

Conference Proceedings
Kim,D. ; Lera,J.D. ; Cho,H. ; Moon,J.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.255-260,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
6.

Conference Proceedings

Conference Proceedings
Ryoo,M. ; Nam,D. ; Cho,H. ; Moon,J. ; Lee,S.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.307-314,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
7.

Conference Proceedings

Conference Proceedings
Park,W.S. ; Cho,H. ; Byun,Y.K. ; Park,N.Y.
Pub. info.: Optomechatronic systems : 5-6 November 2000, Boston, USA.  pp.80-91,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4190
8.

Conference Proceedings

Conference Proceedings
Ko,K.W. ; Kim,J.W. ; Cho,H. ; Jin,K.S. ; Koh,K.I.
Pub. info.: Optomechatronic systems : 5-6 November 2000, Boston, USA.  pp.51-61,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4190
9.

Conference Proceedings

Conference Proceedings
Koh,K.C. ; Choi,H.J. ; Kim,J.S. ; Ko,K.W. ; Cho,H.
Pub. info.: Optomechatronic systems : 5-6 November 2000, Boston, USA.  pp.202-211,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4190
10.

Conference Proceedings

Conference Proceedings
Roh,Y.J. ; Kim,B.M. ; Cho,H. ; Kim,H.C.
Pub. info.: Optomechatronic systems : 5-6 November 2000, Boston, USA.  pp.181-191,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4190