1.

Conference Proceedings

Conference Proceedings
Cho, W. I. ; Park, J. H. ; Chung, D. H. ; Choi, S. W. ; Han, W. S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599205-599205,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
2.

Conference Proceedings

Conference Proceedings
Kim, D. Y. ; Cho, W. I. ; Park, J. H. ; Chung, D. H. ; Cha, B. C. ; Choi, S. W. ; Han, W. S. ; Park, K. H. ; Kim, N. W. ; Hess, C. ; Ma, W. ; Kim, D.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599209-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992