1.

Conference Proceedings
Conference Proceedings
1. Thermal Decomposition Mechanism of Ti(O-iPr)2(DPM)2
Ryu, H.-K. ; Heo, J.S. ; Cho, S.-I. ; Moon, S.H.
Pub. info.: Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis.  pp.329-334,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-23
2.

Conference Proceedings
Conference Proceedings
2. Temperature-Programmed Desorption Study on the Decomposition Mechanism of Ti (OC3H7)4 on Si (100)
Cho, S.-I. ; Chung, C.-H. ; Moon, S.H.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.76-83,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13