1.

Conference Proceedings

Conference Proceedings
Ford, Wayne T. ; Heichelheim, H.R. ; Sieck, Cheri K. ; Chitturi, P.R.
Pub. info.: AIChE SPRING NATIONAL MTG. -NEW ORLEANS, LA., MARCH 6-10, 1988.  1988.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1988
2.

Conference Proceedings

Conference Proceedings
Lu, W. ; Archie, C.N. ; Stone, S. ; Kang, H.H. ; Chitturi, P.R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.503-514,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375