Lu, W. ; Archie, C.N. ; Stone, S. ; Kang, H.H. ; Chitturi, P.R.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVIII. pp.503-514, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering