1.

Conference Proceedings
Conference Proceedings
1. THE EFFECT OF POLYSILICON DOPING (USING ION IMPLANTATION OR PBr3 DIFFUSION OR INSITU DOPING) ON TiSi2 FORMATION
Chittipeddi, S. ; Dziuba, C. M ; Kelly, M. J., ; Kannan, V. C. ; Irwin, R. B. ; Kahora, P. M. ; Cochoran, W. T.
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.207-212,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
2.

Conference Proceedings
Conference Proceedings
2. ACCELERATION OF STRESS-MIGRATION FAILURE IN ALUMINUM INTERCONNECT
Ryan, V. ; Lytle, S.A. ; McCurry, N.M. ; Favreau, D.P. ; Chittipeddi, S.
Pub. info.: Proceedings of the Second International Symposium on Corrosion and Reliability of Electronic Materials and Devices.  pp.11-22,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-1
3.

Conference Proceedings
Conference Proceedings
3. COMPARISON OF VAPOR-PHASE AND WET CHEMICAL PRE-GATE OXIDE AND PRE-CONTACT CLEANS
Draper, C.W. ; Anyanwu, V.E. ; Eisenberg, J.H. ; Felton, G.J. ; Roy, P.K. ; Chittipeddi, S. ; Bechtold, P.F. ; Hagner, G. ; Cooper, D. ; Syverson, D. ; Witowski, B. ; Van Eck, B. ; Gordon, M.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.392-400,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
4.

Conference Proceedings
Conference Proceedings
4. CHARACTERIZATION OF RAPID THERMALLY NITRATED TITATNIUM FILMS CONTACTING SILICIDED AND NON-SILICIDED JUNCTIONS
Chittipeddi, S. ; Kelly, M. J. ; Dziuba, C. M. ; Irwin, R. B. ; Kahora, P. M. ; Kannan, V. C ; Cochran, W. T.
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.387-392,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
5.

Conference Proceedings
Conference Proceedings
5. COMPARATIVE STUDIES OF GATE OXIDES USING THERMAL, STACKED GATE, AND RAPID THERMAL OXIDATION
Chittipeddi, S. ; Roy, P. K. ; Kannan, V. C. ; Singh, R. ; Dziuba, C. M.
Pub. info.: Polysilicon thin films and interfaces.  pp.327-332,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182