1.

Conference Proceedings

Conference Proceedings
Lee, T.Y. ; Ihm, D. ; Kang, H.C. ; Lee, J.B. ; Lee, B.-H. ; Chin, S.-B. ; Cho, D.-H. ; Kim, Y.H. ; Yang, H.D. ; Yang, K.M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.623-632,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
2.

Conference Proceedings

Conference Proceedings
Kim, J.- ; Kim, S.-J. ; Chin, S.-B. ; Oh, S.-H. ; Goo, D.-H. ; Lee, S.-J. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T. ; Raymond, C.J. ; Littau, M.E. ; Youn, B.J. ; Sohn, C.-J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.541-549,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
3.

Conference Proceedings

Conference Proceedings
Lee, T.Y. ; Whan, N.-K. ; Lee, B.H. ; Chin, S.-B. ; Cho, D.H. ; Choi, J.I. ; Hur, S.S. ; Ko, K.H. ; Yeo, J.-H.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.859-864,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
4.

Conference Proceedings

Conference Proceedings
Lee, B.H. ; Chin, S.-B. ; Cho, D.H. ; Song, C.-L. ; Yeo, J.-H. ; Some, D. ; Reinhorn, S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.849-858,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375