1.

Conference Proceedings
Conference Proceedings
1. Compact electron-based EUV source
Egbert, A. ; Tkachenko, B. ; Ostendorf, A. ; Becker, S. ; Chichkov, B.N.
Pub. info.: Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany.  pp.265-268,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5063
2.

Conference Proceedings
Conference Proceedings
2. Amplification of acoustic oscillations by short laser pulses due to fast heating of electrons
Afanasiev, Yu.V. ; Chichkov, B.N. ; Isakov, V.A. ; Kanavin, A.P. ; Uryupin, S.A.
Pub. info.: ECLIM 2002 : 27th European Conference on Laser Interaction with Matter : 7-11 October 2002, Moscow, Russia.  pp.643-650,  2003.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5228
3.

Conference Proceedings
Conference Proceedings
3. Temporal characteristics of an electron-based ultrashort hard x-ray source
Hinze, U. ; Egbert, A. ; Chichkov, B.N. ; Eidmann, K.
Pub. info.: X-ray sources and optics : 2-3 August 2004, Denver, Colorado, USA.  pp.11-17,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5537
4.

Conference Proceedings
Conference Proceedings
4. Electron-based microfocus soft-x-ray source and applications
Egbert, A. ; Tkachenko, B. ; Becker, S. ; Chichkov, B.N.
Pub. info.: X-ray sources and optics : 2-3 August 2004, Denver, Colorado, USA.  pp.64-74,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5537
5.

Conference Proceedings
Conference Proceedings
5. Compact high-repetition-rate femtosecond laser-driven hard-x-ray source
Egbert, A. ; Mader, B. ; Chichkov, B.N. ; Girardeau-Montaut, J.
Pub. info.: Advances in laboratory-based X-ray sources and optics III : 8 July, 2002, Seattle, Washington, USA.  pp.69-76,  2002.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4781
6.

Conference Proceedings
Conference Proceedings
6. High-repetition-rate compact ultrashort x-ray source and applications
Egbert, A. ; Chichkov, B.N.
Pub. info.: Commercial and biomedical applications of ultrafast lasers III : 28-30 January 2003, San Jose, California, USA.  pp.92-100,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4978
7.

Conference Proceedings
Conference Proceedings
7. Compact debris-free EUV source for advanced mirror metrology
Egbert, A. ; Tkachenko, B. ; Becker, S. ; Chichkov, B.N.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA.  pp.1-9,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5533
8.

Conference Proceedings
Conference Proceedings
8. Toward nanostructuring with femtosecond laser pulses
Korte, F. ; Koch, J. ; Fallnich C. ; Ostendorf, A. ; Chichkov, B.N.
Pub. info.: Nanotechnology.  pp.93-100,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5118
9.

Conference Proceedings
Conference Proceedings
9. Three-dimensional nanostructuring by two-photon polymerization of hybrid materials
Serbin, J.J. ; Chichkov, B.N.
Pub. info.: Nanotechnology.  pp.571-576,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5118
10.

Conference Proceedings
Conference Proceedings
10. Three-dimensional microfabrication with femtosecond laser pulses
Serbin, J. ; Houbertz, R. ; Fallnich, C. ; Chichkov, B.N.
Pub. info.: Laser Micromachining for Optoelectronic Device Fabrication.  pp.73-76,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4941