1.

Conference Proceedings
Conference Proceedings
1. Enhanced Pulsed Plasma Operation by Suppressing Side Band Modes
Chi, K.K. ; Hahm, J.H. ; Shin, K.S. ; Shin, H.S. ; Jung, C.O. ; Koh, Y.B. ; Lee, M.Y.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.96-105,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
2.

Conference Proceedings
Conference Proceedings
2. Study on Etching Mechanism of Al2O3 as a Stopper Layer for Self-Aligned Contact in a High Density Plasma Tool
Park, W.J. ; Hong, J. ; Jeon, J.S. ; Min, G.J. ; Chi, K.K. ; Moon, J.T.
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.428-435,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17
3.

Conference Proceedings
Conference Proceedings
3. Comparison of Tungsten Bit Line Mask Scheme for the Next Generation 4Giga DRAM
Hong, J. ; Jeon, J.S. ; Choi, J.D. ; Min, G.J. ; Chi, K.K.
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.507-515,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17