1.

Conference Proceedings
Conference Proceedings
1. Solid Phase Epitaxy- Activation and Deactivation of Boron in Ultra-Shallow Junctions
Lerch, W. ; Paul, S. ; Niess, J. ; Crisliano, F. ; Lamrani, Y. ; Colvo, P. ; Cherkashin, N. ; Downey, D.F. ; Arevalo, E.A.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.90-105,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
2.

Conference Proceedings
Conference Proceedings
2. Solid Phase Epitaxy Process Integration on 50 nm PMOS Devices : Effects of Defects on Chemical and Electrical Characteristics of Ultra-Shallow Junctions
El-Farhane, R. ; Laviron, C. ; Cristiano, F. ; Cherkashin, N. ; Morin, P. ; Juhel, M. ; Stolk, P. ; Arnaud, F. ; Pouydebasque, A. ; Wacquant, F. ; Lenoble, D. ; Halimaoui, A.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.21-30,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
3.

Conference Proceedings
Conference Proceedings
3. On the 'Life' of {113} Defects
Cherkashin, N. ; Calvo, P. ; Cristiano, F. ; Mauduit, B.de ; Claverie, A.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.103-108,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
4.

Conference Proceedings
Conference Proceedings
4. Oxidation of Si nanocrystals fabricated by ultra-low energy ion implantation in thin SiO2 layers
Coffin, H. ; Bonafos, C. ; Schamm, S. ; Cherkashin, N. ; Respaud, M. ; Ben-Assayag, G. ; Dimitrakis, P. ; Normand, P. ; Tence, M. ; Colliex, C. ; Claverie, A.
Pub. info.: Materials and processes for nonvolatile memories : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A..  pp.281-286,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 830
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Conference Proceedings
Conference Proceedings
5. Manipulation of 2D Arrays of Si Nanocrystals by Ultra Low Energy Ion Beam Synthesis for non volatile memories applications
Bonafos, C. ; Cherkashin, N. ; Carrada, M. ; Coffin, H. ; Assayag, G. Ben ; Schamm, S. ; Dimitrakis, P. ; Normand, P. ; Perego, M. ; Fanciulli, M. ; Muller, T. ; Heinig, K. H. ; Argawal, A. ; Claverie, A.
Pub. info.: Materials and processes for nonvolatile memories : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A..  pp.217-222,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 830
6.

Conference Proceedings
Conference Proceedings
6. Ge Nanocrystals in MOS-Memory Structures Produced by Molecular-Beam Epitaxy and Rapid-Thermal Processing
Larsen, A. Nylandsted ; Kanjilal, A. ; Hansen, J. Lundsgaard ; Gaiduk, P. ; Normand, P. ; Dimitrakis, P. ; Tsoukalas, D. ; Cherkashin, N. ; Claverie, A.
Pub. info.: Materials and processes for nonvolatile memories : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A..  pp.263-268,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 830
7.

Conference Proceedings
Conference Proceedings
7. Multi-Dot Floating-Gates In MOSFETs for Nonvolatile Memories -Their Ion Beam Synthesis and Morphology
Muller, T. ; Heinig, K.-H. ; Bonafos, C. ; Coffin, H. ; Cherkashin, N. ; Assayag, G. Ben ; Schamm, S. ; Zanchi, G. ; Claverie, A. ; Tence, M. ; Colliex, C.
Pub. info.: Radiation effects and ion-beam processing of materials : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A..  pp.333-338,  2004.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 792