1.

Conference Proceedings

Conference Proceedings
Yang, C.-L. ; Chen, T.Y. ; Huang, M. ; Lur, W.
Pub. info.: Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium.  pp.239-245,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-30
2.

Technical Paper

Technical Paper
Chen, T.Y. ; Zwick, J. ; Tripathy, B. ; Novak, G.
Pub. info.: 2002 SAE world congress : technical paper.  2002.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2002
3.

Conference Proceedings

Conference Proceedings
Chen, T.Y.
Pub. info.: International Conference on Applied Optical Metrology.  pp.110-117,  1998.  Bellingham, Wash..  SPIE--International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3407