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97 results

Conference Proceedings

1. Semiconductor pattern analysis with induced polarization [5992-58]

Chen, T. ; Milster, T. ; Yang, S. H.

Pub. info.:	25th Annual BACUS Symposium on Photomask Technology. pp.59921L-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5992

Conference Proceedings

2. Precision process calibration and CD predictions for low-k1 lithography [5853-64]

Chen, T. ; Park, S. ; Berger, G. ; Coskun, T. H. ; de Vocht, J. ; Chen, F. ; Yu, L. ; Hsu, S. ; van den Broeke, D. ; Socha, R. ; Park, J. ; Gronlund, K. ; Davis, T. ; Plachecki, V. ; Harris, T. ; Hansen, S. ; Lambson, C.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XII. pp.785-799, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5853

Conference Proceedings

3. Optimization of fuzzy controller based on genetic algorithm [6358-130]

Feng, D. ; Jia, J. ; Chen, T. ; Fei, M.

Pub. info.:	Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation. pp.63583M-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6358

Conference Proceedings

4. Tuning parameters of PID controller based on fuzzy logic controlled genetic algorithms [6358-153]

Feng, D. ; Wang, X. ; Fei, M. ; Chen, T.

Pub. info.:	Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation. pp.635849-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6358

Conference Proceedings

5. Dynamic imaging of interaction between protein 14-3-3 and Bid in living cells [6087-19]

Chen, T. ; Xing, D. ; Wang, J.

Pub. info.:	Biophotonics and immune responses : 23-24 January 2006, San Jose, California, USA. pp.60870L-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6087

Conference Proceedings

6. A novel ultrasound-guided shoulder arthroscopic surgery [6141-94]

Tyryshkin, K. ; Mousavi, P. ; Beek, M. ; Chen, T. ; Pichora, D. ; Abolmaesumi, P.

Pub. info.:	Medical Imaging 2006: Visualization, Image-Guided Procedures, and Display. pp.61412L-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6141

Conference Proceedings

7. Experimental investigation of photomask with near-field polarization imaging [6349-196]

Chen, T. ; Milster, T. D. ; Yang, S.-H.

Pub. info.:	Photomask Technology 2006. pp.634953-634953, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6349

Conference Proceedings

8. DEM generation with PRISM/ALOS simulation data: a case study using airborne three-line scanner imagery [5985-205]

Chen, T. ; Shibasaki, R. ; Shinohara, F. ; Wang, C.

Pub. info.:	International Conference on Space Information Technology. pp.59854U-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5985

Conference Proceedings

9. Experimental evaluation of bull’s-eye illumination for csslst-free random contact printing at sub-65nm node [6154-39]

Finders, J. ; Engelen, A. ; Vandenberghe, G. ; Bekaert, J. ; Chen, T.

Pub. info.:	Optical Microlithography XIX. pp.615412-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

10.

Conference Proceedings

10. Patterning 45nm flash/DRAM contact hole mask with hyper-NA immersion lithography and optimized illumination [6154-60]

Chen, T. ; Van Den Broeke D ; Hsu, S ; Park S ; Berger G ; Coskun T ; De Vocht J ; Corcoran N ; Chen F ; Van der Heijden ; Finders J ; Engelen A ; Socha, R

Pub. info.:	Optical Microlithography XIX. pp.61541O-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

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