Kramer, D. E. ; Chen, L-C. ; Palmstrom, C. J. ; Gerberich, W. W.
Pub. info.:
Fundamentals of nanoindentation and nanotribology : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.89-, 1998. Warrendale, Penn.. MRS - Materials Research Society
Caldwell, D. A. ; Chen, L-C. ; Bensaoula, A. H. ; Farrer, J. K. ; Carter, C. B. ; Palmstorm, C. J.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.455-, 1998. Warrendale, Pa.. MRS - Materials Research Society