Health monitoring and smart nondestructive evaluation of structural and biological systems III : 15-17 March 2004, San Diego, California, USA. pp.288-297, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Smart structures and materials 2004 : sensors and smart structures technologies for civil, mechanical, and aerospace systems : 15-18 March 2004, San Diego, California, USA. pp.798-805, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Chen, C.-K. ; Gau, T.-S. ; Shiu, L.-H. ; Lin, B. J.
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Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.435-446, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA. pp.53-63, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Semiconductor and Organic Optoelectronic Materials and Devices. pp.259-267, 2000. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering