1.

Conference Proceedings
Conference Proceedings
1. Multipoint process monitoring system based on an acousto-optic tunable filter (AOTF)
Kim,D. ; You,J.W. ; Kim,S.H. ; Kong,H.J. ; Lee,Y.W. ; Chegal,W. ; Kwak,Y.K.
Pub. info.: Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan.  pp.202-206,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4416
2.

Conference Proceedings
Conference Proceedings
2. In-situ single-wavelength ellipsometer for a vacuum chamber
Chegal,W. ; Ye,S. ; Cho,H.M. ; Lee,Y.W. ; Kim,S.H. ; Kwak,Y.K.
Pub. info.: Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan.  pp.15-18,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4416