1.

Conference Proceedings
Conference Proceedings
1. SILICON SURFACE CLEANING BY A PLASMA IN AFTERGLOW
Charlet, B. ; Peccoud, L.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.243-248,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. Recent Results on Advanced Molecular Wafer Bonding Technology for 3D Integration on Silicon
di Cioccio, L. ; Biasse, B. ; Kostrzewa, M. ; Zussy, M. ; Dechamp, J. ; Charlet, B. ; Vinet, M. ; Fedeli, J.M. ; Poiroux, T. ; Lagahe-Blanchard, C. ; Aspar, B. ; Regreny, P. ; Kernevez, N.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.280-287,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-02
3.

Conference Proceedings
Conference Proceedings
3. Investigation of Local Stress Fields: Finite Element Modeling and High Resolution X-ray Diffraction
Loubens, A. ; Rivero, C. ; Boivin, Ph. ; Charlet, B. ; Fortunier, R. ; Thomas, O.
Pub. info.: Thin films : stresses and mechanical properties XI : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.229-236,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 875