Surface micromachined devices for microwave and photonic applications (Invited Paper)
- Author(s):
- Chang,M.F. ( Univ.of California/Los Angeles (USA) )
- Wu,M.C. ( Univ.of California/Los Angeles (USA) )
- Yao,J.J. ( Rockwell Science Ctr. (USA) )
- Motamedi,M.E. ( Rockwell Science Ctr. (USA) )
- Publication title:
- Optoelectronic Materials and Devices
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3419
- Pub. Year:
- 1998
- Page(from):
- 214
- Page(to):
- 226
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819428738 [0819428736]
- Language:
- English
- Call no.:
- P63600/3419
- Type:
- Conference Proceedings
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