Chang, T.-H. Yang E.Y. ; Luo, G. ; Chen, K.M ; Yang, T.-Y. ; Tseng, H.-C. ; Chang, C.-Y.
Pub. info.:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.183-190, 2003. Pennington, NJ. Electrochemical Society
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.465-472, 2003. Pennington, NJ. Electrochemical Society
Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. pp.371-375, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Li, T.-Z. ; Ho, W.-L. ; Wang, H. C-. H. ; Chang, C.-Y.
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.383-388, 2005. Pennington, NJ. Electrochemical Society