1.

Conference Proceedings

Conference Proceedings
Tzu, S.-D. ; Chang, C.-H. ; Chen, W.-C. ; Kliem, K.-H. ; Hudek, P. ; Beyer, D.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.100-108,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
2.

Conference Proceedings

Conference Proceedings
Chang, C.-H.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.32-43,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
3.

Conference Proceedings

Conference Proceedings
Rasmussen, A.P. ; Aquila, A. ; Bookbinder, J. ; Chang, C.-H. ; Gullikson, E.M. ; Heilmann, R.K. ; Kahn, S.M. ; Paerels, F. ; Schattenburg, M.L.
Pub. info.: Optics for EUV, X-Ray, and gamma-ray astronomy : 4-7 August 2003, San Diego, California, USA.  pp.248-259,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5168
4.

Conference Proceedings

Conference Proceedings
Heilmann, R.K. ; Akilian, M. ; Chang, C.-H. ; Chen, C.G. ; Forest, C.R. ; Joo, C. ; Konkola, P.T. ; Montoya, J.C. ; Sun, Y. ; You, J. ; Schattenburg, M.L.
Pub. info.: Optics for EUV, X-Ray, and gamma-ray astronomy : 4-7 August 2003, San Diego, California, USA.  pp.271-282,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5168
5.

Conference Proceedings

Conference Proceedings
Heilmann, R. K. ; Akilian, M. ; Chang, C.-H. ; Hallock, R. ; Cleaveland, E. ; Schattenburg, M. L.
Pub. info.: Optics for EUV, x-ray, and gamma-ray astronomy II : 3-4 August 2005, San Diego, California, USA.  pp.590009-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5900
6.

Conference Proceedings

Conference Proceedings
Seely, J. F. ; Goray, L. I. ; Kjornrattanawanich, B. ; Laming, J. M. ; Holland, G. E. ; Flanagan, K. A. ; Heilmann, R. K. ; Chang, C.-H. ; Schattenburg, M. L. ; Rasmussen, A. P.
Pub. info.: Optics for EUV, x-ray, and gamma-ray astronomy II : 3-4 August 2005, San Diego, California, USA.  pp.59000B-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5900
7.

Conference Proceedings

Conference Proceedings
Nguyen, B.-Y. ; Them, A. ; Zhang, D. ; White, T. ; Sadaka, M. ; Triyoso, D. ; Schaeffer, J. ; Goolsby, B. ; Dhandapani, V. ; Nguyen, T. ; Vartanian, V. ; McCormick, L. ; Theodore, D. ; Zollner, S. ; Xie, Q. ; Wang, X.-D. ; Canonico, M. ; Kotte, M. ; Shi, Z. ; Mathew, L. ; Zavala, M. ; Parker, C. ; Cottard, H. ; Hildreth, J. ; Prabhu, L. ; Rai, R. ; Murphy, S. ; Montgomery, P. ; Kalpat, S. ; Ramon, M. ; Demkov, A. ; Taylor, B. ; Gilmer, D. ; Adams, V. ; Jiang, J. ; Chen, J. ; Chang, C.-H. ; Kaushik, V. ; Chandna, L. ; Sadd, M. ; Barr, A. ; Vandooren, A. ; Pham, D. ; Mendlcino, M. ; Cheek, J. ; Tseng, H. ; White, B. ; Tobin, P. ; Orlowski, M. ; Venkatesan, S. ; Mogab, J. (Invited Paper)
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.259-273,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05
8.

Conference Proceedings

Conference Proceedings
Stearns, Mary Beth ; Petford-Long, Amanda K. ; Chang, C.-H. ; Stearsn, D.G. ; Ceglio, N.M. ; Hawryluk, A.M.
Pub. info.: Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A..  pp.345-350,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 77
9.

Conference Proceedings

Conference Proceedings
Lee, T.-K. ; Wang, Y.-C. ; Chi, M. ; Lu, C.Y. ; Hsieh, C.H. ; Liu, R.G. ; Liao, H.J. ; Yang, S.S. ; Chang, C.-H.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.346-352,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
10.

Conference Proceedings

Conference Proceedings
Chang, C.-H. ; Wei, Su-Huai ; Ahrenkiel, S.P. ; Johnson, J.W. ; Stanbery, B.J. ; Anderson, T.J. ; Zhang, S.B ; Al-Jassim, M.M. ; Bunker, G. ; Payzant, E.A. ; Duran, R.
Pub. info.: II-VI compound semiconductor photovoltaic materials : symposium held April 16-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 668