1.

Conference Proceedings

Conference Proceedings
Choi, S.-J. ; Cha, H.-S. ; Yoon, S.-Y. ; Kim, Y.-D. ; Lee, D.-H. ; Kim, J.-M. ; Kim, J.-S. ; Min, D.-S. ; Jang, P.-J. ; Chang, B.-S. ; Kwon, H.-J. ; Choi, B.-Y. ; Choi, S.-S. ; Jeong, S.H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.303-311,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
2.

Conference Proceedings

Conference Proceedings
Kwon, H.-J. ; Min, D.-S. ; Jang, P.-J. ; Chang, B.-S. ; Choi, B.-Y. ; Jeong, S.-H.
Pub. info.: 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.60-65,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4764
3.

Conference Proceedings

Conference Proceedings
Min, D.-S. ; Chang, B.-S. ; Kwon, H.-J. ; Choi, B.-Y.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.694-701,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
4.

Conference Proceedings

Conference Proceedings
Chang, B.-S. ; Min, D.-S. ; Kwon, H.-J. ; Choi, B.-Y.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.702-712,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889