1.

Conference Proceedings

Conference Proceedings
Chen,S.Y. ; Shen,Z.X. ; Xu,S.Y. ; See,A.K. ; Chan,L.H. ; Li,W.S.
Pub. info.: Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore.  pp.272-275,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4426
2.

Conference Proceedings

Conference Proceedings
Cha,C.L. ; Chor,E.F. ; Gong,H. ; Zhang,A.Q. ; Chan,L.H. ; Xie,J.
Pub. info.: Microelectronic Device Technology : 1-2 October 1997, Austin, Texas.  pp.368-375,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3212
3.

Conference Proceedings

Conference Proceedings
Loong,S.Y. ; Lee,H.K. ; Chan,L.H. ; Zhou,M.S. ; Loh,F.C. ; Tan,K.L.
Pub. info.: Microelectronic Device Technology : 1-2 October 1997, Austin, Texas.  pp.376-382,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3212
4.

Conference Proceedings

Conference Proceedings
Ong,S.Y. ; Chor,E.F. ; Leung,Y.K. ; Lee,J. ; Li,W.S. ; See,A. ; Chan,L.H.
Pub. info.: Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore.  pp.270-278,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4228
5.

Conference Proceedings

Conference Proceedings
Koh,H.P. ; Lin,Q.Y. ; Hu,X. ; Chan,L.H.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part1  pp.240-251,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999
6.

Conference Proceedings

Conference Proceedings
Soo,C.P. ; Fan,M.H. ; Bourdillon,A.J. ; Chan,L.H.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.727-734,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
7.

Conference Proceedings

Conference Proceedings
Lim,C.W, ; Lahiri,S.K. ; Tung,C.H. ; Wong,S.M. ; Lee,K.H. ; Wong,H. ; Pey,K.L. ; Chan,L.H.
Pub. info.: Microelectronic Device Technology : 1-2 October 1997, Austin, Texas.  pp.151-161,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3212
8.

Conference Proceedings

Conference Proceedings
Ho,C.S. ; Pey,K.L. ; Wong,H. ; Karunasiri,R.P.G. ; Chua,S.J. ; Lee,K.H. ; Tang,Y. ; Wong,S.M. ; Chan,L.H.
Pub. info.: Microlithographic Techniques in IC Fabrication.  pp.243-254,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3183
9.

Conference Proceedings

Conference Proceedings
Loong,S.Y. ; Lee,H.K. ; Zhou,M.S. ; Chan,L.H. ; Premachandran,V.
Pub. info.: Multilevel Interconnect Technology II.  pp.170-180,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3508
10.

Conference Proceedings

Conference Proceedings
Ang,T.C. ; Tse,M.S. ; Chan,L.H. ; Sudijono,J.L.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV.  pp.233-239,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3510