1.
Conference Proceedings
Fonash, S.J. ; Ditizio, R.A. ; Gu, T. ; Mikulan, P.I. ; Awadelkarim, O.O. ; Collins, R.W. ; Rembetski, J.F. ; Reinhardt, K.A. ; Chan, Y.D.
Pub. info.:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A. . pp.55-68, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
259
2.
Conference Proceedings
Awadelkarim, O.O. ; Gu, T. ; Mikulan, P.I. ; Fonash, S.J. ; Reinhardt, K. ; Chan, Y.D.
Pub. info.:
Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control . pp.331-342, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-21
3.
Conference Proceedings
Mikulan, P.I. ; Koo, T.T. ; Awadelkarim, O.O. ; Fonash, S.J. ; Ta, T. ; Chan, Y.D.
Pub. info.:
Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control . pp.396-402, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-21
4.
Conference Proceedings
Gu, T. ; Awadelkarim, O.O. ; Fonash, S.J. ; Rembetski, J.F. ; Chan, Y.D.
Pub. info.:
Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control . pp.302-310, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-21