1.

Conference Proceedings

Conference Proceedings
Wei, G. ; Tang, Z. ; Yu, J. ; Chan, P.C.H.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.181-185,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
2.

Conference Proceedings

Conference Proceedings
Yu, J. ; Tang, Z. ; Wei, G. ; Chan, P.C.H.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.234-237,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601