Miragliotta, Joseph ; Osiander, R. ; Champion, J. L. ; Oursler, D. A. ; Kistenmacher, T. J.
Pub. info.:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.217-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Lamb, J. L. ; Wichenden, D. K. ; Champion, J. L. ; Givens, R. B. ; Osiander, R. ; Kistenmacher, T. J.
Pub. info.:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.211-, 2000. Warrendale, Pa.. MRS-Materials Research Society