1.

Conference Proceedings
Conference Proceedings
1. Metrology automation reliability
Chain,E.E.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II.  pp.42-52,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2874
2.

Conference Proceedings
Conference Proceedings
2. In-line electrical probe for CD metrology
Chain,E.E. ; Griswold,M.D.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II.  pp.135-146,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2876
3.

Conference Proceedings
Conference Proceedings
3. Submicron calibration strategy for CD control
Chain,E.E. ; Kulkens,L. ; Harris,T.A.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II.  pp.250-256,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2876
4.

Conference Proceedings
Conference Proceedings
4. SPC qualification strategy for CD metrology
Chain,E.E. ; Ridens,M.G. ; Annand,J.P.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II.  pp.218-224,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2876
5.

Conference Proceedings
Conference Proceedings
5. Control of polysilicon on-film particulates with on-product measurements
Barker,J.A. ; Chain,E.E. ; Plachecki,V.E.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III.  pp.12-17,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3213