1.

Conference Proceedings

Conference Proceedings
Moon,S.-Y. ; Ki,W.-T. ; Cha,B.-C. ; Choi,S.-W. ; Yoon,H.-S. ; Sohn,J.-M.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.573-576,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
2.

Conference Proceedings

Conference Proceedings
Kim,J.-M. ; Choi,S.-W. ; Cha,B.-C. ; Yoon,H.-S. ; Sohn,J.-M.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.466-472,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884
3.

Conference Proceedings

Conference Proceedings
Cha,B.-C. ; Kim,J.-M. ; Kim,B.-G. ; Choi,S.-W. ; Yoon,H.-S. ; Sohn,J.-M.
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.55-62,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546
4.

Conference Proceedings

Conference Proceedings
Cha,B.-C. ; Moon,S.-Y. ; Ki,W.-T. ; Yang,S.-H. ; Choi,S.-W. ; Han,W.-S. ; Yoon,H.-S. ; Sohn,J.-M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.200-209,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
5.

Conference Proceedings

Conference Proceedings
Cha,B.-C. ; Park,J.-H. ; Choi,Y.-H. ; Kim,J.-M. ; Han,W.-S. ; Yoon,H.-S. ; Sohn,J.-M.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  4186  pp.508-512,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
6.

Conference Proceedings

Conference Proceedings
Cha,B.-C. ; Kim,Y.-H. ; Choi,S.-W. ; Yu,Y.-H. ; Sohn,J.-M.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.34-41,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236