1.

Conference Proceedings
Conference Proceedings
1. Structural and Optical Characterization of Polycrystalline Silicon Films Deposited by Single Wafer CVD
Sassela, A. ; Borghesi, A. ; Amore, G. ; Tallarida, G. ; Spiga, S. ; Cazzaniga, F. ; Ferroni, G. ; Queirolo, G.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1282-1288,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. Ultrathin NO/N2O oxynitride dielectric for advanced flash memory application: Single wafer and batch technology
Zonca, R. ; Crivelli, B. ; Polignano, M. L. ; Cazzaniga, F. ; Alessandri, M. ; Caricato, A. P. ; Bersani, M. ; Sbetti, M. ; Vanzetti, L. ; Xing, G. C. ; Miner, G. E. ; Astici, N. ; Kuppurao, S. ; Lopes, D. ; Nesso, S.
Pub. info.: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.141-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 592
3.

Conference Proceedings
Conference Proceedings
3. Evaluating the Denuded Zone Depth by Measurements of the Recombination Activity of Bulk Defects
Polignano, M. L. ; Brambilla, M. ; Cazzaniga, F. ; Pavia, G. ; Zanderigo, F. ; Spiga, S. ; Moro, L. ; Castaldini, A. ; Cavallini, A.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.569-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
4.

Conference Proceedings
Conference Proceedings
4. Effects of Ion Metal Plasma (IMP) Titanium Deposition on Ti Silicide Formation
Sabbadini, A. ; Cazzaniga, F. ; Brambilla, M. ; Bresolin, C. ; Cusi, V. ; Marangon, T. ; Queirolo, G.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.23-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
5.

Conference Proceedings
Conference Proceedings
5. Novel Electromigration Failure Mechanism for Aluminum-Based Metallization on Titanium Substrate
Girardi, G. ; Caprile, C. ; Cazzaniga, F. ; Riva, L.
Pub. info.: Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.59-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 516
6.

Conference Proceedings
Conference Proceedings
6. Nitridation by NO or N2O of Si-SiO2 Interfaces
Caricato, A. P. ; Cazzaniga, F. ; Cerofolini, G. F. ; Crivelli, B. ; Polignano, M. L. ; Tallarida, G. ; Valeri, S. ; Zonca, R.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.135-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
7.

Conference Proceedings
Conference Proceedings
7. Physical-Chemical Evolution Upon Thermal Treatments of Al2O3, HfO2 and Al/Hf Composite Materials Deposited by ALCVDTM
Crivelli, B. ; Alessandri, M. ; Alberici, S. ; Cazzaniga, F. ; Dekadjevi, D. ; Maes, J.W. ; Ottaviani, G. ; Pavia, G. ; Queirolo, G. ; Santucci, S. ; Zanderigo, F.
Pub. info.: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.149-154,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 745