Development of an amorphous diamond (a-D) RF MEMS switch
- Author(s):
Webster, J.R. ( Sandia National Labs. (USA) ) Dyck, C.W. ( Sandia National Labs. (USA) ) Friedmann, T.A. ( Sandia National Labs. (USA) ) Sullivan, J.P. ( Sandia National Labs. (USA) ) Nordquist, C.D. ( Sandia National Labs. (USA) ) Carton, A.J. ( Sandia National Labs. (USA) ) Kraus, G.M. ( Sandia National Labs. (USA) ) Schmidt, G.D. ( L&M Technologies, Inc. (USA) ) - Publication title:
- MEMS/MOEMS Components and Their Applications
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5344
- Pub. Year:
- 2004
- Page(from):
- 71
- Page(to):
- 78
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452528 [0819452521]
- Language:
- English
- Call no.:
- P63600/5344
- Type:
- Conference Proceedings
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