A New Characterisation Process Used to Qualify SOI Films
- Author(s):
Moriceau, H ( (LETI-CEA), ) Aspar, B ( (LETI-CEA), ) Bruel, M ( (LETI-CEA), ) Cartier, A M ( (LETI-CEA), ) Morales, C ( (LETI-CEA), ) Soubie, A ( (LETI-CEA), ) Barge, T ( (SOIThC) ) Bressot, S ( (SOIThC) ) Maleville, C ( (SOIThC) ) Auberton, A I ( (SOIThC) ) - Publication title:
- Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 99-3
- Pub. Year:
- 1999
- Page(from):
- 173
- Page(to):
- 178
- Pages:
- 6
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772259 [1566772257]
- Language:
- English
- Call no.:
- E23400/99-3
- Type:
- Conference Proceedings
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