1.

Conference Proceedings

Conference Proceedings
Poppe, W. J. ; Capodieci, L. ; Neureuther, A.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560E-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings

Conference Proceedings
Poppe, W. J. ; Capodieci, L. ; Wu, J. ; Neureuther, A.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560P-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
3.

Conference Proceedings

Conference Proceedings
Yang, J. ; Capodieci, L. ; Sylvester, D.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560A-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
4.

Conference Proceedings

Conference Proceedings
Jessop, J. L. P. ; Goldie, S. N. ; Scranton, A. B. ; Blanchard, G. J. ; Rangarajan, B. ; Capodieci, L. ; Subramanian, R. ; Templeton, M. K.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.914-922,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
5.

Conference Proceedings

Conference Proceedings
Yang, J. ; Capodieci, L. ; Sylvester, D.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.189-197,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
6.

Conference Proceedings

Conference Proceedings
Consales, M. ; Campopiano, S. ; Cusano, A. ; Penza, M. ; Aversa, P. ; Capodieci, L. ; Giordano, M.
Pub. info.: 17th International Conference on Optical Fibre Sensors.  pp.46-49,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5855
7.

Conference Proceedings

Conference Proceedings
Capodieci, L.
Pub. info.: Optical Microlithography XIX.  pp.615401-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
8.

Conference Proceedings

Conference Proceedings
Lorusso, G. F. ; Capodieci, L. ; Stoler, D. ; Schulz, B. ; Roling, S. ; Schramm, J. ; Tabery, C. ; Shah, K. ; Singh, B. ; Abbott, G. ; Azordegan, A. ; Heinrichs, L. ; Kaliblotzky, Z. ; Castel, E.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
9.

Conference Proceedings

Conference Proceedings
Capodieci, L.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615201-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
10.

Conference Proceedings

Conference Proceedings
Torres, J.A. ; Granik, Y. ; Capodieci, L.
Pub. info.: Optical Microlithography XV.  Part One  pp.179-187,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691