1.

Conference Proceedings

Conference Proceedings
Bravo-Vasquez, J. P. ; Kwark, Y.-J. ; Ober, C. K. ; Cao, H. B. ; Deng, H.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.109-121,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings

Conference Proceedings
Yueh, W. ; Cao, H. B. ; Thirumala, V. ; Choi, H.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.149-161,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
3.

Conference Proceedings

Conference Proceedings
Lavery, K. A. ; Choi, K.-W. ; Vogt, B. D. ; Prabhu, V. M. ; Lin, E. K. ; Wu, W. ; Satija, S. K. ; Leeson, M. J. ; Cao, H. B. ; Thompson, G. ; Deng, H. ; Fryer, D. S.
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.615313-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153