Zahavai, J. ; Tamir, S. ; Rotel, M. ; Campisi, G. J.
Pub. info.:
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.101-106, 1988. Pittsburgh, Pa.. Materials Research Society
Crowley, J. L. ; Liao, J. C. ; Kleins, P. H. ; Campisi, G. J.
Pub. info.:
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.103-108, 1989. Pittsburgh, Pa.. Materials Research Society