1.

Conference Proceedings

Conference Proceedings
Zahavai, J. ; Tamir, S. ; Rotel, M. ; Campisi, G. J.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.101-106,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101
2.

Conference Proceedings

Conference Proceedings
Crowley, J. L. ; Liao, J. C. ; Kleins, P. H. ; Campisi, G. J.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.103-108,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146