Plasma Etching for the Application to Low-K Dielectrics Devices

Plasma Etching for the Application to Low-K Dielectrics Devices

Author(s):

Publication title:

Research trends in contemporary materials science : YUCOMAT VIII : selected papers presented at the 8th Conference of the Yugoslav Materials Research Society, held in Herceg Novi, Montenegro September 4-8, 2006

Title of ser.:

Materials science forum

Ser. no.:

555

Pub. Year:

2007

Page(from):

113

Page(to):

118

Pages:

6

Pub. info.:

Stafa-Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494415 [0878494413]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00046609
Series ID:	PA00000012
Conf. info. (Name):	Yugoslav Materials Research Society Conference
Conf. info. (Number):	2006 : 8th
Conf. info. (Venue):	Herceg Novi, Montenegro
Conf. info. (Date):	2006.09.04-2006.09.08

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