1.

Conference Proceedings

Conference Proceedings
W.-S. Han ; C.-J. Sohn ; Y.-B. Kim ; K.-H. Kim ; H.-K. Kang
Pub. info.: Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California.  pp.494-505,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2440
2.

Conference Proceedings

Conference Proceedings
S.-Y. Moon ; W.-S. Han ; S.-G. Woo ; C.-J. Sohn ; C.-H. Kim
Pub. info.: Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California.  pp.784-795,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2440