1.
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Conference Proceedings
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C. Shim ; H. Lim ; S. Jung ; I. Shin ; K. Park ; J. Whang ; H. Lee ; J. Kim ; J. Han ; K. Kim
Pub. info.: |
Dielectrics for nanosystems II: materials science, processing, reliability, and manufacturing. pp.243-254, 2006. Pennington, N.J.. Electrochemical Society |
Title of ser.: |
ECS transactions |
Ser. no.: |
2(1) |
|
2.
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Conference Proceedings
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S. Kim ; C. Shim ; J. Hong ; H. Lee ; J. Han ; K. Kim ; Y. Kim
Pub. info.: |
Dielectrics for nanosystems II: materials science, processing, reliability, and manufacturing. pp.237-242, 2006. Pennington, N.J.. Electrochemical Society |
Title of ser.: |
ECS transactions |
Ser. no.: |
2(1) |
|
3.
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Conference Proceedings
|
H. Jeon ; C. Shim ; J. Hong ; J. Han ; K. Kim
Pub. info.: |
Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6518 |
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