1.

Conference Proceedings

Conference Proceedings
M. Galeti ; J. A. Martino ; E. R. Simoen ; C. L. Claeys
Pub. info.: High purity silicon 9.  pp.351-360,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(4)
2.

Conference Proceedings

Conference Proceedings
P. Srinivasan ; E. Simoen ; L. Pantisano ; C. L. Claeys ; D. Misra ; C. Rittersma
Pub. info.: Physics and technology of high-k gate dielectrics III.  pp.681-692,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(5)
3.

Conference Proceedings

Conference Proceedings
E. R. Simoen ; K. Opsomer ; C. L. Claeys ; K. Maex ; C. Detavernier ; R. Van Meirhaeghe ; S. Forment ; P. Clauws
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment.  pp.391-402,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(2)