1.

Conference Proceedings

Conference Proceedings
Y. Shih ; G. K. Huang ; C. Yu ; M. Adel ; C. K. Huang ; P. Izikson ; E. Kassel ; S. Mathur ; C. Huang ; D. Tien ; Y. Avrahamov
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings

Conference Proceedings
M. Adel ; P. lzikson ; D. Tien ; C. K. Huang ; J. C. Robinson
Pub. info.: Quantum optics, optical data storage, and advanced microlithography : 12-14 November 2007, Beijing, China.  pp.682722-1-682722-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6827