A.V. Sampath ; M. Reed ; C. Chua ; G. Garrett ; E.D. Readinger
Pub. info.:
State-of-the-art program on compound semiconductors 47 (SOTAPOCS 47) and wide-bandgap semiconductor materials and devices 8. pp.157-164, 2007. Pennington, N.J.. Electrochemical Society
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment. pp.437-444, 2007. Pennington, NJ. Electrochemical Society