1.

Conference Proceedings
Conference Proceedings
1. Scatterometry on pelliclized masks: an option for wafer fabs
E. Gallagher ; C. Benson ; M. Higuchi ; Y. Okumoto ; M. Kwon ; S. Yedur ; S. Li ; S. Lee ; M. Tabet
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings
Conference Proceedings
2. Mounting and alignment of full-shell replicated x-ray optics
M. Gubarev ; W. Arnold ; C. Benson ; T. Kester ; D. Lehner
Pub. info.: Optics for EUV, x-ray, and gamma-ray astronomy III : 29-30 August 2007, San Diego, California, USA.  pp.66881F-1-66881F-8,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6688